Product Description
The Research Products RP-KV10 Sicera Ultra KV-10 Cryopump offers advanced performance for physical vapor deposition (PVD) applications. It features impressive pumping speeds, allowing for efficient processing. The cryopump delivers a water pumping speed of six thousand five hundred liters per second, with one thousand nine hundred liters per second for argon, two thousand three hundred liters per second for nitrogen, and one thousand eight hundred liters per second for hydrogen.
- Base pressure of less than five point zero E-6 Pa
- Argon throughput of one point two Pa•m3/s (seven hundred sccm)
- Weight of thirty-one kilograms (sixty-eight point three pounds)
Product Highlights
The RP-KV10 model features an ISO 250 inlet flange and bolted flange connection, optimizing its integration into existing systems. The cooldown time to twenty Kelvin is approximately eighty-five minutes, with a warmup time to two hundred ninety Kelvin around forty-five minutes, ensuring rapid readiness for operation.
Product Information
Standard Information
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Model Number: RP-KV10
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Available For Sale In California: Yes
Technical Specifications
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Pumping Speed Water: 6,500 liters/second
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Pumping Speed Argon: 1,900 liters/second
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Pumping Speed Nitrogen: 2,300 liters/second
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Pumping Speed Hydrogen: 1,800 liters/second
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Throughput Argon: 1.2 Pa•m3/s (700 sccm)
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Capacity Argon: 2,000 standard liters
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Capacity Hydrogen: 16 standard liters
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Crossover Rating: 20.0 Pa•m3
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Base Pressure: < 5.0E-6 Pa
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Cooldown Time to 20 K: ≤ 85 Minutes
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Warmup Time to 290 K: ≤ 45 Minutes
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Weight: 31 kg (68.3 lbs.)
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Dimensions (LxWxH): 654 x 335 x 454 mm (25.7 x 13.2 x 17.9 in.)
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Inlet Flange: ISO 250 (bolted flange connection)